Molecular dynamics characterization of as-implanted damage in silicon

Santos, I. / Marques, L. A. / Pelaz, L. et al. | British Library Online Contents | 2005

Radiation damage and annealing behavior of 2.0 MeV 160Er+ implanted silicon

Li, Y. / Tan, C. / Zhang, J. et al. | British Library Online Contents | 2000

Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator

Chen, P. / An, Z. / Zhu, M. et al. | British Library Online Contents | 2004

Precipitates in Antimony implanted Silicon

Kikuchi, Y. / Uesugi, F. / Kase, M. et al. | British Library Online Contents | 1995

Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

Shreter, Y. / Evans, J. H. / Hamilton, B. et al. | British Library Online Contents | 1993