Molecular dynamics characterization of as-implanted damage in silicon: Fid-Bau Portal

Molecular dynamics characterization of as-implanted damage in silicon

Santos, I. / Marques, L. A. / Pelaz, L. / Lopez, P. / Aboy, M. / Barbolla, J.

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Molecular dynamics characterization of as-implanted damage in silicon

Santos, I. / Marques, L. A. / Pelaz, L. / Lopez, P. / Aboy, M. / Barbolla, J.

Molecular dynamics characterization of as-implanted damage in silicon

Santos, I. / Marques, L. A. / Pelaz, L. / Lopez, P. / Aboy, M. / Barbolla, J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Molecular dynamics characterization of as-implanted damage in silicon

Contributors:

Santos, I. (author) / Marques, L. A. (author) / Pelaz, L. (author) / Lopez, P. (author) / Aboy, M. (author) / Barbolla, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 372-375

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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