Microfabrication for Si wafers by FAB etching

Nishimura, T. / Suzuki, H. / Satake, T. | British Library Online Contents | 1993

Microfabrication for Si wafers by FAB etching

Nishimura, T. / Suzuki, H. / Satake, T. | British Library Online Contents | 1993

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Katoh, T. / Yamaguchi, D. / Satoh, Y. et al. | British Library Online Contents | 2002

Microfabrication of Membranes

Wessling, M. / DECHEMA Gesellschaft fur Chemische Technik und Biotechnologie / VDI | British Library Conference Proceedings | 2002

Well-controlled wet etching of ZnO films using hydrogen peroxide solution

Wang, Y. / Wu, T. / Chen, M. et al. | British Library Online Contents | 2014