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Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Lochon, F. d. (Autor:in) / Fadel, L. (Autor:in) / Dufour, I. (Autor:in) / Rebière, D. (Autor:in) / Pistré, J. (Autor:in)
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
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