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Analysis of electrically active N-O complexes in nitrogen-doped CZ silicon crystals by FTIR spectroscopy
Analysis of electrically active N-O complexes in nitrogen-doped CZ silicon crystals by FTIR spectroscopy
Analysis of electrically active N-O complexes in nitrogen-doped CZ silicon crystals by FTIR spectroscopy
Alt, H. C. (Autor:in) / Gomeniuk, Y. V. (Autor:in) / Bittersberger, F. (Autor:in) / Kempf, A. (Autor:in) / Zemke, D. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 114-116
01.01.2006
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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