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Photoelastic characterization of residual stress in GaAs-wafers
Photoelastic characterization of residual stress in GaAs-wafers
Photoelastic characterization of residual stress in GaAs-wafers
Geiler, H. D. (Autor:in) / Karge, H. (Autor:in) / Wagner, M. (Autor:in) / Eichler, S. (Autor:in) / Jurisch, M. (Autor:in) / Kretzer, U. (Autor:in) / Scheffer-Czygan, M. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 345-350
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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