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Growth of high-quality relaxed SiGe films with an intermediate Si1-yCy layer for strained Si n-MOSFETs
Growth of high-quality relaxed SiGe films with an intermediate Si1-yCy layer for strained Si n-MOSFETs
Growth of high-quality relaxed SiGe films with an intermediate Si1-yCy layer for strained Si n-MOSFETs
Chen, P. S. (Autor:in) / Lee, S. W. (Autor:in) / Liao, K. F. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 130 ; 194-199
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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