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Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
Chu, K. (Autor:in) / Shum, P. W. (Autor:in) / Shen, Y. G. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 131 ; 62-71
01.01.2006
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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