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    Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

    New search for: Chu, K.
    New search for: Shum, P. W.
    New search for: Shen, Y. G.

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    Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

    New search for: Chu, K.
    New search for: Shum, P. W.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

    New search for: Chu, K.
    New search for: Shum, P. W.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

    Contributors:

    Chu, K. (author) / Shum, P. W. (author) / Shen, Y. G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 131 ; 62-71

    Publication date:

    2006-01-01

    Size:

    10 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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