Copper in silicon: quantitative analysis of internal and proximity gettering

McHugo, S. A. / Heiser, T. / Hieslmair, H. et al. | British Library Online Contents | 1997

Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. et al. | British Library Online Contents | 2000

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Effect of internal gettering of iron on electrical characteristics of devices

Talvitie, H. / Haarahiltunen, A. / Savin, H. et al. | British Library Online Contents | 2009

Advanced Gettering Techniques in ULSI Technology

Istratov, A. A. / Hieslmair, H. / Weber, E. R. | British Library Online Contents | 2000