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Extremely proximity gettering for semiconductor devices

Park, J. G. / Lee, G. S. / Lee, J. S. / Kurita, K. / Furuya, H.

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Extremely proximity gettering for semiconductor devices

Park, J. G. / Lee, G. S. / Lee, J. S. / Kurita, K. / Furuya, H.

Extremely proximity gettering for semiconductor devices

Park, J. G. / Lee, G. S. / Lee, J. S. / Kurita, K. / Furuya, H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Extremely proximity gettering for semiconductor devices

Contributors:

Park, J. G. (author) / Lee, G. S. (author) / Lee, J. S. (author) / Kurita, K. (author) / Furuya, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 249-256

Publication date:

2006-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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