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Transmission electron microscopy studies of HfO2 thin films grown by chloride-based atomic layer deposition
Transmission electron microscopy studies of HfO2 thin films grown by chloride-based atomic layer deposition
Transmission electron microscopy studies of HfO2 thin films grown by chloride-based atomic layer deposition
Mitchell, D. R. (Autor:in) / Aidla, A. (Autor:in) / Aarik, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 606-617
01.01.2006
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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