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Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Tanner, C. M. (Autor:in) / Lu, J. (Autor:in) / Blom, H. O. (Autor:in) / Chang, J. P. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
Silicon Carbide and Related Materials - 2005 ; 1075-1078
MATERIALS SCIENCE FORUM ; 527/529
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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