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Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Structural and Morphological Properties of Ultrathin HfO~2 Dielectrics on 4H-SiC (0001)
Tanner, C. M. (author) / Lu, J. (author) / Blom, H. O. (author) / Chang, J. P. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
Silicon Carbide and Related Materials - 2005 ; 1075-1078
MATERIALS SCIENCE FORUM ; 527/529
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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