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Amorphization kinetics of germanium under ion implantation
Amorphization kinetics of germanium under ion implantation
Amorphization kinetics of germanium under ion implantation
Koffel, S. (Autor:in) / Claverie, A. (Autor:in) / BenAssayag, G. (Autor:in) / Scheiblin, P. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 664-667
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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