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Mechanisms of fatigue in LIGA Ni MEMS thin films
Mechanisms of fatigue in LIGA Ni MEMS thin films
Mechanisms of fatigue in LIGA Ni MEMS thin films
Yang, Y. (Autor:in) / Imasogie, B. I. (Autor:in) / Allameh, S. M. (Autor:in) / Boyce, B. (Autor:in) / Lian, K. (Autor:in) / Lou, J. (Autor:in) / Soboyejo, W. O. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING A ; 444 ; 39-50
01.01.2007
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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