Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Spectroscopic ellipsometry characterization of ZrO2 thin films by nitrogen-assisted reactive magnetron sputtering
Spectroscopic ellipsometry characterization of ZrO2 thin films by nitrogen-assisted reactive magnetron sputtering
Spectroscopic ellipsometry characterization of ZrO2 thin films by nitrogen-assisted reactive magnetron sputtering
Zhu, L. Q. (Autor:in) / Fang, Q. (Autor:in) / He, G. (Autor:in) / Liu, M. (Autor:in) / Xu, X. X. (Autor:in) / Zhang, L. D. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1025-1030
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Characterization of DC reactive magnetron sputtered NiO films using spectroscopic ellipsometry
| British Library Online Contents | 2011
Spectroscopic ellipsometry of SiO2/CdTe nanocomposite thin films prepared by dc magnetron sputtering
| British Library Online Contents | 2009
Reactive DC Magnetron Sputtering of Vanadium Oxide Thin Films
| British Library Online Contents | 2008
AlNxOy thin films deposited by DC reactive magnetron sputtering
| British Library Online Contents | 2010
Interfacial and optical properties of ZrO2/Si by reactive magnetron sputtering
| British Library Online Contents | 2006