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Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS
Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS
Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS
Cho, S. W. (Autor:in) / Chasiotis, I. (Autor:in)
EXPERIMENTAL MECHANICS ; 47 ; 37-49
01.01.2007
13 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.1
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