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    Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS

    New search for: Cho, S. W.
    New search for: Chasiotis, I.

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    Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS

    New search for: Cho, S. W.
    New search for: Chasiotis, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS

    New search for: Cho, S. W.
    New search for: Chasiotis, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS

    Contributors:

    Cho, S. W. (author) / Chasiotis, I. (author)

    Published in:

    EXPERIMENTAL MECHANICS ; 47 ; 37-49

    Publication date:

    2007-01-01

    Size:

    13 pages

    ISSN:

    0014-4851

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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