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Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation
Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation
Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation
Yang, J. H. (Autor:in) / Cheng, M. F. (Autor:in) / Luo, X. D. (Autor:in) / Zhang, T. H. (Autor:in)
SURFACE REVIEW AND LETTERS ; 13 ; 519-524
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530.417
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