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    Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation

    New search for: Yang, J. H.
    New search for: Cheng, M. F.
    New search for: Luo, X. D.
    New search for: Zhang, T. H.

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    Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation

    New search for: Yang, J. H.
    New search for: Cheng, M. F.
    New search for: Luo, X. D.
    New search for: Zhang, T. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation

    New search for: Yang, J. H.
    New search for: Cheng, M. F.
    New search for: Luo, X. D.
    New search for: Zhang, T. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Characterization of Surface Properties and Microstructure of PVD-TiN Films Using MEVVA Ion Implantation

    Contributors:

    Yang, J. H. (author) / Cheng, M. F. (author) / Luo, X. D. (author) / Zhang, T. H. (author)

    Published in:

    SURFACE REVIEW AND LETTERS ; 13 ; 519-524

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0218-625X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530.417

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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