Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition: Fid-Bau Portal

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Tzeng, S. S. / Wu, W. M. / Hsu, J. S.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Tzeng, S. S. / Wu, W. M. / Hsu, J. S.

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Tzeng, S. S. / Wu, W. M. / Hsu, J. S.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Beteiligte:

Tzeng, S. S. (Autor:in) / Wu, W. M. (Autor:in) / Hsu, J. S. (Autor:in) / Chandra, T. / Tsuzaki, K. / Militzer, M. / Ravindran, C.

Erschienen in:

Supplement to THERMEC 2006, 5th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, July 4-8, 2006, Vancouver, Canada ; 3574-3579

MATERIALS SCIENCE FORUM ; 539/543

Erscheinungsdatum:

01.01.2007

Format / Umfang:

6 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Effects of surface oxygen on carbon films synthesized by plasma enhanced chemical vapor deposition

Wang, Fangwei / Wang, Yujin / Chen, Lei et al. | British Library Online Contents | 2016

Microwave plasma enhanced chemical vapor deposition diamond synthesis from high carbon content source

Hung, C.-C. / Tang, Y.-S. / Shih, H.-C. | British Library Online Contents | 2002

Diamond nucleation on unscratched silicon substrates coated with various non-diamond carbon films by microwave plasma-enhanced chemical vapor deposition

Feng, Z. et al. | British Library Online Contents | 1995

Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Nakazawa, H. / Miura, S. / Kamata, R. et al. | British Library Online Contents | 2013

Nach oben