Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Effects of surface oxygen on carbon films synthesized by plasma enhanced chemical vapor deposition

Wang, Fangwei / Wang, Yujin / Chen, Lei et al. | British Library Online Contents | 2016

Microwave plasma enhanced chemical vapor deposition diamond synthesis from high carbon content source

Hung, C.-C. / Tang, Y.-S. / Shih, H.-C. | British Library Online Contents | 2002

Diamond nucleation on unscratched silicon substrates coated with various non-diamond carbon films by microwave plasma-enhanced chemical vapor deposition

Feng, Z. et al. | British Library Online Contents | 1995

Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Nakazawa, H. / Miura, S. / Kamata, R. et al. | British Library Online Contents | 2013