Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN: Fid-Bau Portal

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

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Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

Zugriff

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Bestellung bei Subito €

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Titel:

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Beteiligte:

Kobayashi, K. (Autor:in) / Kondo, Y. (Autor:in) / Tomita, Y. (Autor:in) / Maeda, Y. (Autor:in) / Matsushima, S. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 253 ; 5035-5039

Erscheinungsdatum:

01.01.2007

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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