Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN: Fid-Bau Portal

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

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Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Kobayashi, K. / Kondo, Y. / Tomita, Y. / Maeda, Y. / Matsushima, S.

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Order at Subito €

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Document information

Title:

Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

Contributors:

Kobayashi, K. (author) / Kondo, Y. (author) / Tomita, Y. (author) / Maeda, Y. (author) / Matsushima, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 5035-5039

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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