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Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Qin, Y. / Feng, T. / Li, Z. / Sun, Z.

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Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Qin, Y. / Feng, T. / Li, Z. / Sun, Z.

Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Qin, Y. / Feng, T. / Li, Z. / Sun, Z.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Ähnliche Titel

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Titel:

Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

Beteiligte:

Qin, Y. (Autor:in) / Feng, T. (Autor:in) / Li, Z. (Autor:in) / Sun, Z. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 257 ; 7993-7996

Erscheinungsdatum:

01.01.2011

Format / Umfang:

4 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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