Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results
Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results
Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results
Wilks, J. A. (Autor:in) / Magtoto, N. P. (Autor:in) / Kelber, J. A. (Autor:in) / Arunachalam, V. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 6176-6184
01.01.2007
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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