Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results: Fid-Bau Portal

Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results

Wilks, J. A. / Magtoto, N. P. / Kelber, J. A. / Arunachalam, V.

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Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results

Wilks, J. A. / Magtoto, N. P. / Kelber, J. A. / Arunachalam, V.

Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results

Wilks, J. A. / Magtoto, N. P. / Kelber, J. A. / Arunachalam, V.

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Check availability in my library

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Document information

Title:

Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results

Contributors:

Wilks, J. A. (author) / Magtoto, N. P. (author) / Kelber, J. A. (author) / Arunachalam, V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 6176-6184

Publication date:

2007-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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