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Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Waite, M. M. (Autor:in) / Shah, S. I. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 140 ; 64-68
01.01.2007
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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