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Modeling target erosion during reactive sputtering
Modeling target erosion during reactive sputtering
Modeling target erosion during reactive sputtering
Strijckmans, K. (Autor:in) / Depla, D. (Autor:in)
APPLIED SURFACE SCIENCE ; 331 ; 185-192
01.01.2015
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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