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Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Target poisoning during reactive sputtering of silicon with oxygen and nitrogen
Waite, M. M. (author) / Shah, S. I. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 140 ; 64-68
2007-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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Modeling target erosion during reactive sputtering
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