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Ion Implantation Induced Modifications in Reactively Sputtered Cr-N Layers on Si Substrates
Ion Implantation Induced Modifications in Reactively Sputtered Cr-N Layers on Si Substrates
Ion Implantation Induced Modifications in Reactively Sputtered Cr-N Layers on Si Substrates
Novakovic, M. (Autor:in) / Popovic, M. (Autor:in) / Perusko, D. (Autor:in) / Radovic, I. (Autor:in) / Milinovic, V. (Autor:in) / Milosavljevic, M. (Autor:in) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.
01.01.2007
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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