Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps: Fid-Bau Portal

Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

Kirchner, K. W. / Jones, K. A. / Derenge, M. A. / Dudley, M. / Powell, A. R.

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Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

Kirchner, K. W. / Jones, K. A. / Derenge, M. A. / Dudley, M. / Powell, A. R.

Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

Kirchner, K. W. / Jones, K. A. / Derenge, M. A. / Dudley, M. / Powell, A. R.

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Titel:

Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

Beteiligte:

Kirchner, K. W. (Autor:in) / Jones, K. A. (Autor:in) / Derenge, M. A. (Autor:in) / Dudley, M. (Autor:in) / Powell, A. R. (Autor:in) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I. / Horsfall, A.

Erschienen in:

Silicon Carbide and Related Materials 2006 ; 213-218

MATERIALS SCIENCE FORUM ; 556/557

Erscheinungsdatum:

01.01.2007

Format / Umfang:

6 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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Effect of graded layer on the X-ray double-crystal diffraction rocking curve

Ouyang, J. T. / Mai, Z. H. / Cui, S. F. et al. | British Library Online Contents | 1992

X-Ray Rocking Curve Characterization of SiC Substrates

Yoganathan, M. / Wu, P. / Zwieback, I. | British Library Online Contents | 2009

Characterization of SiC Substrates Using X-Ray Rocking Curve Mapping

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