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Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Rogozin, A. (Autor:in) / Vinnichenko, M. (Autor:in) / Shevchenko, N. (Autor:in) / Vazquez, L. (Autor:in) / Mucklich, A. (Autor:in) / Kreissig, U. (Autor:in) / Yankov, R. A. (Autor:in) / Kolitsch, A. (Autor:in) / Moller, W. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 2319-2329
01.01.2007
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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