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Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering
Rogozin, A. (author) / Vinnichenko, M. (author) / Shevchenko, N. (author) / Vazquez, L. (author) / Mucklich, A. (author) / Kreissig, U. (author) / Yankov, R. A. (author) / Kolitsch, A. (author) / Moller, W. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 2319-2329
2007-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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