Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
Lee, S. H. (Autor:in) / Park, J. K. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 9112-9115
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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