Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning
The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning
The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning
Amuth, A. (Autor:in) / Stimpel-Lindner, T. (Autor:in) / Senftleben, O. (Autor:in) / Bayerstadler, A. (Autor:in) / Sulima, T. (Autor:in) / Baumgartner, H. (Autor:in) / Eisele, I. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 8389-8393
01.01.2007
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Interaction of GaN epitaxial layers with atomic hydrogen
British Library Online Contents | 2004
|Atomic hydrogen cleaning of a TiN surface
British Library Online Contents | 1994
|Interface atomic structure of LaCuOSe:Mg epitaxial thin film and MgO substrate
British Library Online Contents | 2010
|Boron accumulation at epi-substrate silicon interface during epitaxial growth
British Library Online Contents | 1992
|Atomic hydrogen cleaning, nitriding and annealing InSb (100)
British Library Online Contents | 2000
|