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Boron accumulation at epi-substrate silicon interface during epitaxial growth
Boron accumulation at epi-substrate silicon interface during epitaxial growth
Boron accumulation at epi-substrate silicon interface during epitaxial growth
Pivac, B. (Autor:in) / Borghesi, A. (Autor:in) / Geddo, M. (Autor:in) / Sassella, A. (Autor:in)
01.01.1992
32 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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