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The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Amuth, A. / Stimpel-Lindner, T. / Senftleben, O. / Bayerstadler, A. / Sulima, T. / Baumgartner, H. / Eisele, I.

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The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Amuth, A. / Stimpel-Lindner, T. / Senftleben, O. / Bayerstadler, A. / Sulima, T. / Baumgartner, H. / Eisele, I.

The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Amuth, A. / Stimpel-Lindner, T. / Senftleben, O. / Bayerstadler, A. / Sulima, T. / Baumgartner, H. / Eisele, I.

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Title:

The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Contributors:

Amuth, A. (author) / Stimpel-Lindner, T. (author) / Senftleben, O. (author) / Bayerstadler, A. (author) / Sulima, T. (author) / Baumgartner, H. (author) / Eisele, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 8389-8393

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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