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Preparation of five-layered Si/SixGe1-x nano-films by RF helicon magnetron sputtering
Preparation of five-layered Si/SixGe1-x nano-films by RF helicon magnetron sputtering
Preparation of five-layered Si/SixGe1-x nano-films by RF helicon magnetron sputtering
Tanemura, S. (Autor:in) / Miao, L. (Autor:in) / Watanabe, T. (Autor:in) / Imaoka, M. (Autor:in) / Tanemura, M. (Autor:in) / Mori, Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 254 ; 308-311
01.01.2007
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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