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Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering
Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering
Transient processes and structural transformations in SixGe1-x layers during oxygen implantation and sputtering
Kruger, D. (Autor:in) / Efremov, A. A. (Autor:in) / Murota, J. (Autor:in) / Tillack, B. (Autor:in) / Kurps, R. (Autor:in) / Romanova, G. P. (Autor:in)
APPLIED SURFACE SCIENCE ; 203-204 ; 285-289
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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