Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films: Fid-Bau Portal

Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Chandra, S. V. / Uthanna, S. / Rao, G. M.

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Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Chandra, S. V. / Uthanna, S. / Rao, G. M.

Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Chandra, S. V. / Uthanna, S. / Rao, G. M.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Titel:

Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Beteiligte:

Chandra, S. V. (Autor:in) / Uthanna, S. (Autor:in) / Rao, G. M. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 254 ; 1953-1960

Erscheinungsdatum:

01.01.2008

Format / Umfang:

8 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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Tan, S. / Zhang, X. / Wu, X. et al. | British Library Online Contents | 2011

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