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    Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

    New search for: Chandra, S. V.
    New search for: Uthanna, S.
    New search for: Rao, G. M.

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    Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

    New search for: Chandra, S. V.
    New search for: Uthanna, S.
    New search for: Rao, G. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

    New search for: Chandra, S. V.
    New search for: Uthanna, S.
    New search for: Rao, G. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

    Contributors:

    Chandra, S. V. (author) / Uthanna, S. (author) / Rao, G. M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 1953-1960

    Publication date:

    2008-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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