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Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Jonnalagadda, K. (Autor:in) / Cho, S. W. (Autor:in) / Chasiotis, I. (Autor:in) / Friedmann, T. (Autor:in) / Sullivan, J. (Autor:in)
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS ; 56 ; 388-401
01.01.2008
14 pages
Aufsatz (Zeitschrift)
Englisch
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