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Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Jonnalagadda, K. (author) / Cho, S. W. (author) / Chasiotis, I. (author) / Friedmann, T. (author) / Sullivan, J. (author)
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS ; 56 ; 388-401
2008-01-01
14 pages
Article (Journal)
English
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