Towards Plastic Electronics: Patterning Semiconducting Polymers by Nanoimprint Lithography

Behl, M. / Seekamp, J. / Zankovych, S. et al. | British Library Online Contents | 2002

Study on contamination of projection optics surface for extreme ultraviolet lithography

Koida, K. / Niibe, M. | British Library Online Contents | 2009

Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography

Madey, T. E. / Faradzhev, N. S. / Yakshinskiy, B. V. et al. | British Library Online Contents | 2006

Patterning at the nanoscale: Atomic force microscopy and extreme ultraviolet interference lithography

Parisse, P. / Luciani, D. / D'Angelo, A. et al. | British Library Online Contents | 2009

Effect of post-etch cleaning on Ru-capped extreme ultraviolet lithography photomask

Oh, J. / Park, C. / Seo, D. et al. | British Library Online Contents | 2012