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UV-curable nanoimprint resin with enhanced anti-sticking property
UV-curable nanoimprint resin with enhanced anti-sticking property
UV-curable nanoimprint resin with enhanced anti-sticking property
Kim, J. Y. (Autor:in) / Choi, D. G. (Autor:in) / Jeong, J. H. (Autor:in) / Lee, E. S. (Autor:in)
APPLIED SURFACE SCIENCE ; 254 ; 4793-4796
01.01.2008
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Anti-sticking treatment for a nanoimprint stamp
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