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A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 22 ; 731-739
01.01.2008
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621
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