Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Wang, Y. (Autor:in) / Zhao, C. h. (Autor:in) / Cao, F. (Autor:in) / Yang, D. w. (Autor:in)
MATERIALS LETTERS ; 62 ; 3761-3763
01.01.2008
3 pages
Aufsatz (Zeitschrift)
Englisch
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