A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems
Wang, Y. (author) / Zhao, C. h. (author) / Cao, F. (author) / Yang, D. w. (author)
MATERIALS LETTERS ; 62 ; 3761-3763
2008-01-01
3 pages
Article (Journal)
English
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